Advanced simulation framework for AMHS

Abstract

AMHS (automated material handling system) vendors are being expected not only to offer transport capabilities but also to guarantee its contribution to entire fab productivities. One of essential techniques for realizing this is estimation with using simulation studies prior to installation of AMHS into a fab. However traditional framework of AMHS simulation cannot enable to estimate entire fab productivities. This paper describes a new simulation framework for estimation of entire fab productivities, which describes what should be modeled and how they should be modeled.