On buried-oxide effects in SOI lateral bipolar transistors

S. Banna, P.C.H. Cuong, T. Nguyen, P. Ko
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引用次数: 2

Abstract

In this paper an investigation on buried oxide effects in SOI lateral n-p-n bipolar transistors is presented. An anomalous buried oxide induced punchthrough effect is observed even for uniformly doped base and zero back-gate bias in SOI bipolar transistor. A better explanation for this effect is presented. This punchthrough is attributed to increased depletion widths compared to the bulk at collector and emitter junctions due to the presence of buried oxide in SOI substrates. The widely accepted depletion approximation fails to predict the depletion widths in SOI p-n junctions. Finally, a quasi-two-dimensional model is presented to model the potential distribution in the depletion region of SOI p-n junctions. Model predictions are found to be in good agreement with simulation data. Also the model is applied to design a lateral n-p-n transistor.<>
SOI侧双极晶体管的埋地氧化效应
本文研究了SOI横向n-p-n双极晶体管中的埋地氧化物效应。在SOI双极晶体管中,均匀掺杂基极和零背偏置时,也观察到埋藏氧化物引起的异常穿孔效应。对这种效应提出了一个更好的解释。由于SOI衬底中埋藏氧化物的存在,与集电极和发射极结处的体积相比,这种穿孔归因于增加的耗尽宽度。广泛接受的损耗近似不能预测SOI p-n结的损耗宽度。最后,提出了一个准二维模型来模拟SOI p-n结耗尽区的电位分布。模型预测结果与模拟数据吻合良好。并将该模型应用于横向n-p-n晶体管的设计
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