Design and comparison of three-type VCMs for nano-positioning system

Abstract

This paper introduces three-type voice coil motors (VCMs) for nano-positioning system. These VCMs all consists dual-magnet stator and coil mover which is sandwiched between these two-layer magnets with different topology structures of the stators and movers. The motor structures, magnetic field distribution, thrust force and force ripple of these VCMs are studied and compared. Equivalent magnetic circuit method and the finite element analysis (FEA) are employed to analyze the performance of these VCMs. The results show that the VCM with Halbach array permanent magnets and three-segment coil mover has the largest force constant and smallest force ripple. A prototype of the Halbach VCM is manufactured and tested. The experimental results accord well with which of the simulation.