Efficient TCAD methodology for ESD failure current prediction of smart power ESD protection

Abstract

This work deals with a method to predict ESD protection robustness with TCAD simulations. Tested on different devices and two smart power technologies, the results are validated with electrical measurement and failure analysis. Failure current is always predicted with a good accuracy compared to technology spreading. In addition, the methodology provides a significant simulation time speedup compared to classical methods based on a temperature criterion.