Batch size optimization of a furnace and pre-clean area by using dynamic simulations

Abstract

A dynamic simulation model is a powerful and fast tool to analyze existing production situations and to optimize the performance by evaluating alternative scheduling rules. This paper presents such an analysis and optimization for a furnace and pre-clean area of a wafer fab. The design of a dynamic model is described. Furthermore, experiments are described that illustrate the influence of a minimum batch size scheduling rule. For a specific production situation, the minimum batch sizes per furnace process which optimize cycle time are determined.