Optimization of RF MEMS capacitive switches in static and dynamic regimes based on reduced models

Abstract

The paper describes the implementation of optimization routines, in the APLAC programming language to optimize a RF MEMS (Radio Frequency Micro Electromechanical Systems) capacitive switch. The optimization methods were applied to complete the goals in the static regime. The focus of the paper was to create efficient, fast and robust routines for material and geometric optimization of the device. The paper novelty was the code and the approach to apply the software, based on electrical equivalent circuits for multi-physics optimization. The automatic procedure to compute switching and release times was also described in the code. Majority of the tasks were performed in the RF design software, called APLAC from National Instrument AWR company.