Automatic fault location using E-beam and LSI testers

Abstract

In this paper, we propose a method for locating faults using an E-beam tester together with a conventional LSI tester. This method applies the fault analysis method using vector pairs by Cox and Rajski to the analysis and diagnosis using E-beam tester. Since an accurate observation of VLSI is possible by E-beam probing, high fault coverage with a few observation time can be attained.<>