Increasing the capacity of micromechanical gyroscope comb actuator using bistable suspension

Abstract

This paper presents the development and design tests of the micromechanical gyroscope (MMG) having electrostatic actuator of the primary oscillations with an arched suspension. Efficiency of the model is experimentally verified. The result of this research is the increased efficiency of the electrostatic comb actuator of the MMG. The increased efficiency of the comb actuator makes it possible to reduce control voltage and electric noise of the MMG.