Polarization-dependent Talbot effect with variable duty cycle

Shubin Li, Changhe Zhou, G. Barbastathis
{"title":"Polarization-dependent Talbot effect with variable duty cycle","authors":"Shubin Li, Changhe Zhou, G. Barbastathis","doi":"10.1109/OMN.2014.6924584","DOIUrl":null,"url":null,"abstract":"It has recently been observed that the location of Talbot planes becomes dependent on polarization of the incident light for grating periods in the rage of 2~3 free-space wavelengths. Here, we investigate the effect of grating duty cycle and its potential use for control of two- or three-dimensional pattern formation in nanolithography.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2014.6924584","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract

It has recently been observed that the location of Talbot planes becomes dependent on polarization of the incident light for grating periods in the rage of 2~3 free-space wavelengths. Here, we investigate the effect of grating duty cycle and its potential use for control of two- or three-dimensional pattern formation in nanolithography.
可变占空比的依赖偏振的塔尔博特效应
最近观察到,在自由空间波长2~3的范围内,塔尔博特平面的位置依赖于入射光的偏振。在这里,我们研究光栅占空比的影响及其在纳米光刻中控制二维或三维图案形成的潜在用途。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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