{"title":"Image processing technology for scanning electron microscopy","authors":"O. Tutunaru, R. Pascu","doi":"10.1109/SMICND.2019.8924031","DOIUrl":null,"url":null,"abstract":"Quantification of the noise content in the scanning electron microscope image is an important parameter in the signal-to-noise ratio. The most common type of noise in SEM image is the Gaussian noise. We compared different noise reduction filters, like average, median, Gaussian Smoothing and Wiener filters, in order to see the image improvement. Based on the experiment results the most promising is the Wienerfilter.","PeriodicalId":151985,"journal":{"name":"2019 International Semiconductor Conference (CAS)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 International Semiconductor Conference (CAS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2019.8924031","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Quantification of the noise content in the scanning electron microscope image is an important parameter in the signal-to-noise ratio. The most common type of noise in SEM image is the Gaussian noise. We compared different noise reduction filters, like average, median, Gaussian Smoothing and Wiener filters, in order to see the image improvement. Based on the experiment results the most promising is the Wienerfilter.