A test setup for the characterization of Lorentz-force MEMS magnetometers

Abstract

Lorentz-force Microelectromechanical Systems (MEMS) magnetometers have been proposed to replace magnetometers in current consumer electronics products. As a result, there exist numerous works that propose MEMS transducers and readout systems. However, when it comes to the characterization of MEMS devices, a wide variety of strategies and instruments are used, making it difficult to compare results from different works. In this article, a test setup for the characterization of Lorentz-force MEMS magnetometers is proposed. The solution in based in the use of an impedance analyser along with a simple and flexible circuit that provides the in-phase driving of the voltage and the current of the MEMS. The proposed solution has been successfully used to characterize MEMS magnetometers with very different characteristics.