Multi-Process, Products and Machine Control Chart Application in Semiconductors

Abstract

For foundry factories, the different products have their respective spec in foundry factories, so we standardize it and monitor the process performance by multi-process, multi-products and multi-machine. The standardized control chart can solve the control problems of Shewhart control chart in high-mix and low-volume products, and combine with different products, machines, and process layers. It can also be used in LtL/WtW/WiW to get the variations of these sources immediately.