Investigating the relationship between material properties and laser-induced damage threshold of dielectric optical coatings at 1064 nm

R. Bassiri, C. Clark, I. Martin, A. Markosyan, P. Murray, J. Tessmer, S. Rowan, M. Fejer
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引用次数: 8

Abstract

The Laser Induced Damage Threshold (LIDT) and material properties of various multi-layer amorphous dielectric optical coatings, including Nb2O5, Ta2O5, SiO2, TiO2, ZrO2, AlN, SiN, LiF and ZnSe, have been studied. The coatings were produced by ion assisted electron beam and thermal evaporation; and RF and DC magnetron sputtering at Helia Photonics Ltd, Livingston, UK. The coatings were characterized by optical absorption measurements at 1064 nm by Photothermal Common-path Interferometry (PCI). Surface roughness and damage pits were analyzed using atomic force microscopy. LIDT measurements were carried out at 1064 nm, with a pulse duration of 9.6 ns and repetition rate of 100 Hz, in both 1000-on-1 and 1-on-1 regimes. The relationship between optical absorption, LIDT and post-deposition heat-treatment is discussed, along with analysis of the surface morphology of the LIDT damage sites showing both coating and substrate failure.
研究了介质光学涂层在1064nm处材料性能与激光损伤阈值的关系
研究了Nb2O5、Ta2O5、SiO2、TiO2、ZrO2、AlN、SiN、LiF和ZnSe等多种多层非晶介质光学涂层的激光诱导损伤阈值(LIDT)和材料性能。采用离子辅助电子束和热蒸发法制备涂层;射频和直流磁控溅射,英国利文斯顿Helia Photonics公司。采用光热共路干涉法(PCI)对涂层进行了1064 nm的光吸收测量。利用原子力显微镜对表面粗糙度和损伤坑进行了分析。LIDT测量在1064 nm处进行,脉冲持续时间为9.6 ns,重复频率为100 Hz,有1000对1和1对1两种模式。讨论了光学吸收、LIDT和沉积后热处理之间的关系,并分析了LIDT损伤部位的表面形貌,显示了涂层和衬底的破坏。
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