Mechanical influences on the electrical characteristics of the mobile gate MOS capacitors

2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595) Pub Date : 2002-08-07 DOI:10.1109/MIEL.2002.1003181

L. Dobrescu, D. Dobrescu, A. Rusu, C. Ravariu

引用次数: 1

Abstract

This paper presents the model for an electromechanical variable capacitor designed as an MOS capacitor with a beam. It studies the influences of the beam on the electrical characteristics of the capacitor.

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机械对移动栅极MOS电容器电学特性的影响

本文提出了一种机电可变电容器的模型，该模型设计为带波束的MOS电容器。研究了光束对电容器电特性的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)

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