Acoustic wave sensor system design consideration

Abstract

In this paper, we present the development and considerations of simple acoustic wave chemical sensors. These sensors can be used for identifying environmental contaminants in large applications scale. Various finite element models of a Acoustic Wave sensors are developed using CoventorWare and 3D analysis is performed on the devices to study the acoustic wave propagation and characterize the device. The effects of the various interdigital transducers (IDT) design; intermediate layer on the propagation characteristics is also investigated.