Piezoelectric acoustic MEMS sensor based electrical machines condition monitoring-diaphragm design analysis

Abstract

In this paper, we present the effects of diaphragm design parameters on the sensitivity of acoustic sensor used for condition monitoring purpose. We have considered different design parameters of the diaphragm such as shape, dimensions, thickness, type of the piezoelectric material of the diaphragm. We studied the effect of changes in these parameters on the deflection, stress, strain, voltage generated and resonant frequency of the diaphragm which affect the sensitivity of the acoustic sensor. The effect of the changes in these parameters on the sensitivity of the signals acquired by the machines has been simulated and analyzed using Comsol Multiphysics tool.