N. Dmitruk, O.I. Mayeva, O. Yastrubchak, S. Mamykin, M. Klopfleish
{"title":"Multilayer gratings: characterization and application","authors":"N. Dmitruk, O.I. Mayeva, O. Yastrubchak, S. Mamykin, M. Klopfleish","doi":"10.1109/SMICND.1999.810530","DOIUrl":null,"url":null,"abstract":"The characterization methods for a multicoated grating as an optochemical sensor are described. The optochemical sensor uses surface plasmon resonance (SPR) on metal Au thin film vacuum evaporated on a diffraction grating prepared by holographic technique on a GaAs single-crystal. Concentration of the chemical solution is obtained by measuring the SPR condition changes, which are given by the dielectric constant of the solution tested. Characterization of multilayer gratings and demonstration of sensor application are given.","PeriodicalId":223226,"journal":{"name":"CAS '99 Proceedings. 1999 International Semiconductor Conference (Cat. No.99TH8389)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"CAS '99 Proceedings. 1999 International Semiconductor Conference (Cat. No.99TH8389)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.1999.810530","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The characterization methods for a multicoated grating as an optochemical sensor are described. The optochemical sensor uses surface plasmon resonance (SPR) on metal Au thin film vacuum evaporated on a diffraction grating prepared by holographic technique on a GaAs single-crystal. Concentration of the chemical solution is obtained by measuring the SPR condition changes, which are given by the dielectric constant of the solution tested. Characterization of multilayer gratings and demonstration of sensor application are given.