{"title":"Agile Flow Control In Semiconductor Manufacturing: Simulation And Animation Demonstration","authors":"R. Guo, R. Griffin, M. Slama","doi":"10.1109/ISSM.1994.729420","DOIUrl":null,"url":null,"abstract":"Factory flow control seeks to optimize operational performance by reducing production cycle time, work-in-process, and increasing throughput. We will use an animation-based discrete event simulator to highlight the current operational problems and discuss the possible improvement through the choices of wafer release method, lot size and buffer size. A hypothetical implant operation which consists of seven process steps is used as an example. It will be shown that the optimized pull system has a 10 times improvement in both cycle time and work-in-process inventory without sacrificing throughput compared to the current \"push and balanced\" system.","PeriodicalId":114928,"journal":{"name":"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM","volume":"69 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.1994.729420","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Factory flow control seeks to optimize operational performance by reducing production cycle time, work-in-process, and increasing throughput. We will use an animation-based discrete event simulator to highlight the current operational problems and discuss the possible improvement through the choices of wafer release method, lot size and buffer size. A hypothetical implant operation which consists of seven process steps is used as an example. It will be shown that the optimized pull system has a 10 times improvement in both cycle time and work-in-process inventory without sacrificing throughput compared to the current "push and balanced" system.