The performance improvement of coplanar waveguides by silicon micromachined technology

Abstract

This article reports the design and fabrication of micromachined microwave transmission lines with suspended structure in terms of the CMOS technology and the post-processing micromachined technology. Samples with 120 /spl Omega/ of characteristic impedance were fabricated through hybrid etching processes. Measurements were performed on the samples using the automatic network analyzer in a wide range of frequency from 1 to 40GHz. The structures with suspended transmission lines showed significant improvement in transmission attenuation.