{"title":"A Study on Robust Noninteracting Control System Design with Disturbance Feedforward for 6-DoF Active Vibration Isolation Platform","authors":"Thinh Huynh, Dong-Hun Lee, Young-Bok Kim","doi":"10.1109/ISSM55802.2022.10026944","DOIUrl":null,"url":null,"abstract":"This paper proposes a novel noninteracting control strategy for a 6-degree-of-freedom (DoF) active vibration isolation system (AVIS) that carries high-precision machinery or measuring instruments. External vibrations need rejecting effectively, and at the same time, the internal interactions and parameter uncertainties are also worth consideration. For these objectives, the system model is first derived. Then, the proposed control law consists of state feedback, unity feedback from the output, and finally, feedforward from the measured floor motion. The feedback gains are formulated such that noninteracting performance is achieved in the sense that each DoF independently follows its corresponding reference. Moreover, robust stability is obtained from linear matrix inequality (LMI) techniques. Simulation studies have been conducted to validate the proposed control system.","PeriodicalId":130513,"journal":{"name":"2022 International Symposium on Semiconductor Manufacturing (ISSM)","volume":"120 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 International Symposium on Semiconductor Manufacturing (ISSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM55802.2022.10026944","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper proposes a novel noninteracting control strategy for a 6-degree-of-freedom (DoF) active vibration isolation system (AVIS) that carries high-precision machinery or measuring instruments. External vibrations need rejecting effectively, and at the same time, the internal interactions and parameter uncertainties are also worth consideration. For these objectives, the system model is first derived. Then, the proposed control law consists of state feedback, unity feedback from the output, and finally, feedforward from the measured floor motion. The feedback gains are formulated such that noninteracting performance is achieved in the sense that each DoF independently follows its corresponding reference. Moreover, robust stability is obtained from linear matrix inequality (LMI) techniques. Simulation studies have been conducted to validate the proposed control system.