A Study on Robust Noninteracting Control System Design with Disturbance Feedforward for 6-DoF Active Vibration Isolation Platform

Thinh Huynh, Dong-Hun Lee, Young-Bok Kim
{"title":"A Study on Robust Noninteracting Control System Design with Disturbance Feedforward for 6-DoF Active Vibration Isolation Platform","authors":"Thinh Huynh, Dong-Hun Lee, Young-Bok Kim","doi":"10.1109/ISSM55802.2022.10026944","DOIUrl":null,"url":null,"abstract":"This paper proposes a novel noninteracting control strategy for a 6-degree-of-freedom (DoF) active vibration isolation system (AVIS) that carries high-precision machinery or measuring instruments. External vibrations need rejecting effectively, and at the same time, the internal interactions and parameter uncertainties are also worth consideration. For these objectives, the system model is first derived. Then, the proposed control law consists of state feedback, unity feedback from the output, and finally, feedforward from the measured floor motion. The feedback gains are formulated such that noninteracting performance is achieved in the sense that each DoF independently follows its corresponding reference. Moreover, robust stability is obtained from linear matrix inequality (LMI) techniques. Simulation studies have been conducted to validate the proposed control system.","PeriodicalId":130513,"journal":{"name":"2022 International Symposium on Semiconductor Manufacturing (ISSM)","volume":"120 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 International Symposium on Semiconductor Manufacturing (ISSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM55802.2022.10026944","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

Abstract

This paper proposes a novel noninteracting control strategy for a 6-degree-of-freedom (DoF) active vibration isolation system (AVIS) that carries high-precision machinery or measuring instruments. External vibrations need rejecting effectively, and at the same time, the internal interactions and parameter uncertainties are also worth consideration. For these objectives, the system model is first derived. Then, the proposed control law consists of state feedback, unity feedback from the output, and finally, feedforward from the measured floor motion. The feedback gains are formulated such that noninteracting performance is achieved in the sense that each DoF independently follows its corresponding reference. Moreover, robust stability is obtained from linear matrix inequality (LMI) techniques. Simulation studies have been conducted to validate the proposed control system.
六自由度主动隔振平台扰动前馈鲁棒无交互控制系统设计研究
针对搭载高精度机械或测量仪器的六自由度主动隔振系统,提出了一种新的无交互控制策略。外部振动需要有效抑制,同时内部的相互作用和参数的不确定性也值得考虑。针对这些目标,首先推导了系统模型。然后,提出的控制律由状态反馈、输出的单位反馈和测量的楼板运动的前馈组成。反馈增益的制定使得在每个DoF独立遵循其相应参考的意义上实现非交互性能。此外,利用线性矩阵不等式(LMI)技术得到了系统的鲁棒稳定性。仿真研究验证了所提出的控制系统。
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