A Flexible ASIC CIM System (Orchard II)

Abstract

A flexible CIM system for ASIC manufacturing called ORCHARD I1 has been developed, that offers enhanced flexibility of system construction and production line management. It includes modules that handle scheduling, lot tracking, equipment control, data collection and database management. Each module is implemented on distributed workstations to conserve CPU resources. Non-SECS as well as SECS equipment can be easily connected to the system using a ”virtual machine” method. A database schema is automatically generated after designing a data display screen, Collected data are converted into data groups that meet the specific needs of equipment engineers, process engineers, and production line managers based on a ”data processing recipe.” Flexible production line management is achieved using a novel scheduling technology that features a priority evaluation function. With these technologies, even a lowvolume production line can be set up cost-effectively.