Ba0.7 Sr0.3 TiO3 thin film dielectric properties with different deposition layer

Abstract

Barium strontium titanate(Ba_xSr_1-xTiO₃), BST thin film was a ferroelectric material used commercially in worldwide since decades ago. Many researches were done on this BST thin film. In this work, the experiment is focus on the dielectric properties of Ba_0.7Sr_0.3TiO₃ thin film with different deposition layer. As the deposition layer of Ba_0.7Sr_0.3TiO₃ increase, the dielectric properties of the thin film increase.