Investigation into modelling power output for MEMS energy harvesting devices using COMSOL MultiphysicsR

Abstract

A COMSOL MultiphysicsR model was created which provides accurate information on the resonant frequency, stress and power output of an ALN piezoelectric device. The maximum error in the resonant frequency was found to be 4%. The models accurately predicted the trend of the output power for external impedances as well as the matched impedance for maximum energy harvesting. The expected voltage and current output for 1g acceleration was also be modeled.