A method for storing semiconductor test data to simplify data analysis

Jeremy W. Webb
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Abstract

The automated testing of semiconductor wafers, integrated circuits (IC), and surface mount devices generates a large volume of data. These devices are tested in stages and their test data is typically collected in log files, spreadsheets, and comma separated value files that are stored at both the foundry and on-site on file shares. Building a cohesive picture of the quality and performance of these devices can be difficult since the data is scattered throughout many files. In addition, tracking any deviations in performance from wafer to wafer by analyzing historical process control monitoring (PCM) test data is a manual, laborious task. Collecting the test data from multiple sources (e.g., foundries and contract manufacturers) can be cumbersome when manual intervention is required. Automating the transfer of test data from third party servers to on-site file shares is crucial to providing a consistent method of accessing the data for analysis. This paper provides a method of both implementing a database for storing test data collected at the various stages of IC manufacturing, as well as automating the retrieval and import of test data into the database from all relevant sources.
一种存储半导体测试数据以简化数据分析的方法
半导体晶圆、集成电路(IC)和表面贴装器件的自动化测试产生大量数据。这些设备是分阶段进行测试的,它们的测试数据通常收集在日志文件、电子表格和逗号分隔的值文件中,这些文件存储在工厂和现场的文件共享中。由于数据分散在许多文件中,因此很难构建这些设备的质量和性能的统一图像。此外,通过分析历史过程控制监测(PCM)测试数据来跟踪晶圆片与晶圆片之间的性能偏差是一项手动且费力的任务。当需要人工干预时,从多个来源(例如,铸造厂和合同制造商)收集测试数据可能会很麻烦。将测试数据从第三方服务器自动传输到现场文件共享对于提供一致的访问数据进行分析的方法至关重要。本文提供了一种实现数据库的方法,用于存储在集成电路制造的各个阶段收集的测试数据,以及从所有相关来源自动检索和导入测试数据到数据库。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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