The sensitivity and correlation study on Jramp test and high-field constant-voltage stress test for WLR

Abstract

Jramp test and high-field constant voltage stress test are evaluated for both quick reliability assessment and in-line production monitoring. Although the conducting mechanism for both tests are at the Fowler-Nordheim tunneling regime, high-field constant voltage stress test is found to be a more sensitive test than Jramp for in-line production monitor. This can be explained by the nature of Jramp itself based on analysis using accumulative law. By using the dual V-t model to extract reliability information, this paper shows that Jramp can be also used to compare the absolute oxide reliability for different technologies.