Quasi-analytical analysis of the broadband properties of multiconductor transmission lines on semiconducting substrates

Abstract

The electrical properties of single and coupled transmission lines on semiconductor substrates are investigated. The analysis is based on analytical formulas for the frequency-dependent distributed line impedances and admittances. Using these formulas it is possible to characterize the broadband properties of transmission line systems with a minimal amount of computational effort. The validity of the calculated results is proved by comparison with full-wave analyses and experimental data gained from on-chip measurements. A discussion of the calculated line parameters as functions of frequency and substrate conductivity is given. Finally, the influence of the semiconducting substrate on the signal propagation in the time domain is demonstrated by two examples.<>