Paper-based capacitive mass sensor

Abstract

Paper-based MEMS is a new area in the field of micro-electro mechanical systems. We have developed a paper-based MEMS sensing device that is capable of measuring masses as small as 2mg (~20μN) with a sensitivity of 0.5fF/mg. Using this device, we monitored changes in capacitance values, which can be related to mass changes. This capacitive-based mass sensor, which uses a cantilever beam design, promotes and advances the use of paper in the design of micro systems. The work presented in this paper on building a capacitive sensor is advantageous because the overall costs are considerably reduced and the methods used can serve as a building block to conduct initial tests and analyses for future MEMS sensors.