High speed and high accuracy XY-stage for electronic assembly

Abstract

A high-speed, high-accuracy, direct-drive XY-stage developed XY to meet the requirements for LSI or print-circuit board assembly is discussed. This stage has a moving-coil-type linear motor using an NdFeB magnet, which is about 1.5 times as strong as SmCo/sub 5/ rare-earth magnets. Computer aided engineering, including finite-element analysis, was applied to realize optimum design. A two-mode control method, consisting of a traveling mode and a positioning mode, has been developed to obtain stability and high speed positioning. Travel is 50 mm*50 mm, and maximum acceleration is 50 m/s/sup 2/, which is five times as fast as conventional XY-stages.<>