Laser ablation forward deposition of metal lines for electrical interconnect repair

Abstract

Flat-panel display interconnect repair requires an open air (vacuum-system-free), environmentally friendly, dry process with a minimum number of steps. The Laser Ablation Forward Deposition (LAFD) approach described in this paper offers such advantages with the potential for low cost. The Laser Ablation Forward Deposition technique transfers metallic film from a glass support to a nearby substrate by laser ablation. This technique can deposit a wide range of metals.