The importance of wavelength for tight temperature control during μ-laser-assisted machining

A. Dennis, S. Goel, Rajab Al-Sayegh, W. O'Neill
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引用次数: 1

Abstract

The area of single point diamond turning of brittle materials like semiconductors and ceramics is significantly benefitted by incorporation of laser assistance. In a new developmental technology that is now recognized as micro-laser-assisted machining (μ-LAM), a laser is shone through a diamond tool to soften the high-pressure phase transformed ductile machining phases that in turn allows thermal softening and thereby enables a higher material removal rate during ductile mode machining. One of the lasers currently used in μ-LAM is the neodymium-doped yttrium aluminum garnet (Nd:YAG) laser operating at 100 W (continuous wave) at the wavelength of 1064 nm. Although this configuration has worked to the benefit of the technology, here we report futuristic developments that will significantly enhance temperature control by selecting a laser wavelength according to the material being machined, allowing tunable machining properties. The concept is illustrated with sample calculations for μ-LAM of silicon, and it appears to offer better target temperatures, thus enhancing the performance of the μ-LAM process.
在μ激光辅助加工过程中,波长对于严格控制温度的重要性
半导体和陶瓷等脆性材料的单点金刚石车削面积由于激光辅助的结合而显着受益。在一项新的发展技术中,现在被认为是微激光辅助加工(μ-LAM),激光通过金刚石工具照射来软化高压相变的韧性加工阶段,从而允许热软化,从而在韧性模式加工期间实现更高的材料去除率。目前用于μ-LAM的激光器之一是掺钕钇铝石榴石(Nd:YAG)激光器,工作波长为1064 nm,功率为100 W(连续波)。虽然这种配置已经为该技术带来了好处,但在这里,我们报告了未来的发展,将通过根据被加工的材料选择激光波长来显着增强温度控制,从而允许可调的加工性能。通过对硅μ-LAM的实例计算说明了这一概念,结果表明它提供了更好的目标温度,从而提高了μ-LAM工艺的性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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