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A Salicide Base Contact Technology (SCOT) for Use in High Speed Bipolar VLSI

ESSDERC '87: 17th European Solid State Device Research Conference Pub Date : 1987-09-01 DOI:10.1007/978-3-642-74360-3_5
T. Hirao, T. Ikeda, Yoichi Kuramisu
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用于高速双极VLSI的盐基触点技术(SCOT)
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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ESSDERC '87: 17th European Solid State Device Research Conference
ESSDERC '87: 17th European Solid State Device Research Conference
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