Industrial approach to the chip and package reliability of SiC MOSFETs (Invited)

E. Mengotti, E. Bianda, D. Baumann, G. Schlottig, F. Canales
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Abstract

SiC-based power MOSFETs have become the major challengers for state-of-the-art Si technology in numerous power electronics applications. In ABB's portfolio, the list of examples includes motor drives, renewable energy conversion, battery energy storage systems and uninterruptable power supplies. The performance advantages of the wide-band-gap semiconductor are multiple and allow a clear size-to-cost benefit at the system level, making the introduction of SiC into selected products meaningful. To fully profit from the technology, the reliability level needs to be at least equivalent to the legacy Si-based solutions. However, the new technology requires new tests that address the relevant and novel failure mechanisms. The approach used by ABB is discussed in this paper. As part of the approach, various tests and exemplary results are presented, such as high voltage, high temperature tests, high dV / dt tests, avalanche ruggedness, repetitive surge current operation and dedicated gate oxide tests, as well as packaging related tests such as power cycling. The results show that manufacturers have gained control over some of the earlier limitations in first generation SiC devices, and that the available standards must evolve to reflect the SiC specific requirements compared to the previous semiconductor technology.
SiC mosfet芯片和封装可靠性的工业方法(特邀)
基于sic的功率mosfet已成为众多电力电子应用中最先进的Si技术的主要挑战者。在ABB的产品组合中,示例列表包括电机驱动,可再生能源转换,电池储能系统和不间断电源。宽带隙半导体的性能优势是多方面的,并且在系统层面上具有明显的尺寸成本效益,这使得将SiC引入选定的产品具有意义。为了充分利用该技术,可靠性水平需要至少与传统的基于si的解决方案相当。然而,新技术需要新的测试来解决相关的和新的失效机制。本文讨论了ABB采用的方法。作为该方法的一部分,介绍了各种测试和示例性结果,如高压、高温测试、高dV / dt测试、雪崩坚固性、重复浪涌电流操作和专用栅极氧化物测试,以及与封装相关的测试,如电源循环。结果表明,制造商已经控制了第一代SiC器件的一些早期限制,并且与以前的半导体技术相比,现有的标准必须发展以反映SiC的特定要求。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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