High-Voltage Drain Extended MOS Transistors for 0.18 um Logic CMOS Process

J. Mitros, C. Tsai, Hisashi Shichijo, Keith Edmund Kunz, A. Morton, D. Goodpaster, D. Mosher, T. Efland
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引用次数: 29

Abstract

Complementary high-voltage drain extended (DE) MOS transistors were implemented into Texas Instruments' state-of-the-art production advanced analog and digital 1.5-1.8 V CMOS technology (1), (2). These transistors allow for 5-V drain operating voltage using the core gate oxide and have drain breakdown voltages V. Experimental results along with Suprem4 and MEDICI simulation results are presented to explain their operation. The novel p-channel transistors use an isolated compensated p-well as a drain extension. The n-channel version uses n-well as a drain extension. Experimental test results of , , and plots demonstrate DE-MOS performance. The work was focused on performance optimization with zero process modification and hence no cost adder.
用于0.18 um逻辑CMOS工艺的高压漏极扩展MOS晶体管
互补的高压漏极扩展(DE) MOS晶体管被应用到德州仪器最先进的生产先进的模拟和数字1.5-1.8 V CMOS技术中(1),(2)。这些晶体管允许使用核心栅极氧化物的5 V漏极工作电压,并具有漏极击穿电压V。新型p沟道晶体管采用隔离补偿p阱作为漏极扩展。n通道版本使用n井作为漏极扩展。实验测试结果和图显示了DE-MOS的性能。这项工作的重点是在零流程修改的情况下进行性能优化,因此没有成本增加。
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