Performance analysis of MEMS cantilever sensor for agriculture applications

Abstract

A new modern MEMS sensor is designed for humidity and temperature measurement for agriculture field. The simulated results and micro-machined proposed cantilever structure based two sided micro cantilever sensors for agriculture applications are presented in this paper. The temperature and humidity sensor is consisting of sensing materials such as Cu and polysilicon is used, which is designed on the MEMS cantilever. The simulation is done by Intellisuite software. Since the FEM based displacement, stress and strain analysis is obtained. When temperature is applied to the sensor, the material is expanded, due to the coefficient of thermal expansion. In humidity sensor, the pressure increases that causes the cantilever leading to change in the displacement. This work may be potentially useful for sensor design engineers, for agriculture applications.