ATLID beam steering mechanism and derived new piezoelectric-based devices for optical applications

F. Bourgain, F. Barillot, C. Belly, F. Claeyssen
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Abstract

In Space & Defence (as well as in many others fields), there is a trend for miniaturisation in active optics requiring new actuators. Applications also often require the ability to withstand high vibrations and shocks levels, as well as vacuum compatibility for space applications. A new generation of small and smart actuators such as piezoelectric (piezo) actuators, are resolving this trend, thanks to their capacity to offer high energy density and to support both extreme and various requirements. This paper first presents the BSM mechanism and its requirements, the technologies involved in the design and the validation campaign results. Secondly, a derived XY piezoelectric positioning stage based on the same APA® and associated Strain Gage sensing technology is presented with its associated performances. Finally, a new piezoelectric motor based on the APA® technology, which allows the combination of long stroke while maintaining high resolution positioning of optical elements, is presented with experimental performances.
ATLID光束转向机构和衍生的光学应用的新型压电器件
在空间与国防(以及许多其他领域),主动光学小型化的趋势需要新的致动器。应用通常还要求能够承受高振动和冲击水平,以及空间应用的真空兼容性。由于能够提供高能量密度并支持极端和各种要求,新一代小型智能执行器(如压电(压电)执行器)正在解决这一趋势。本文首先介绍了BSM机制及其需求、设计中涉及的技术以及验证活动的结果。其次,基于相同的APA®和相关的应变片传感技术,提出了一种衍生的XY压电定位平台及其相关性能。最后,提出了一种基于APA®技术的新型压电电机,该电机可以在保持光学元件高分辨率定位的同时实现长行程的组合,并具有实验性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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