2N Au wire bonding for ultra fine picth BGA

E. P. Leng, C. Yong, C. Siong, Tsuriya Masahiro, N. Vo, L. Seong, Zulkifli Mohd Faizal, Fadzli Sazilawati
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引用次数: 1

Abstract

In this study, ultra fine pitch wire bonding on a BGA device with Al bond pad was performed to compare 2N wire with conventional 3N and 4N wires for reliability performance after thermal aging. Strip level thermal aging at 175 degree C was carried out. Wire pull test was performed after different thermal aging read point of 100hrs, 250hrs, 500hrs, 750hrs, 1000hrs, 1250hrs, 1500hrs, 1750hrs and 2000hrs to check for pull strength and lifted ball failure mode. The result had proven that 2N wire demonstrated more superior thermal aging reliability performance as compared to 3N and 4N wire. In the 2nd portion of this study, 2N wire was successfully implemented in mass production. However, several challenges were encountered due to the fact that 2N wire is much harder than conventional 3N and 4N wire which resulted in narrower process window and poorer manufacturability. This study is also aimed to share the major problems encountered and the methods to overcome those challenges during high volume manufacturing. First major challenge was lower 2nd bond peel strength due to higher sensitivity towards 2nd bond surface condition. It was found that substrate bond finger surface roughness variation is a critical factor to 2N wire bonding process. This can be improved through substrate manufacturing process optimization to reduce bond fingers surface roughness. At the same time, less optimized bonding input parameters was found to induce low wire peel strength while certain bonding input parameters was found to cause higher missing ball and short tail problem. Hence bonding parameters optimization has to be done carefully through thorough DOE and RSM studies in order to achieve higher peel strength and improve process robustness against 2nd bond surface variation. The 2nd major challenge was off-bond-pad due to harder wire that resulted in higher aluminum squeeze-out upon bonding on aluminum bond pad. It was found that proper process characterization to determine the optimum length of time needed for device expansion on heater block plus further improvement on the wire bonder and bonding parameters could help resolve this issue. The 3rd problem was higher wire stickiness due to higher sensitivity towards moisture from the environment. The main impact of wire stickiness issue was found to be higher machine stoppages due to inconsistent tail, hence resulted in off-center-ball defect. 2nd impact was higher capillary clogging which caused wire sagging and wire loop collapsing. Such wire stickiness problem could be overcome by using different wire quenching solution. In summary, 2N wire is able to improve thermal aging performance of ultra fine pitch wire bonding to meet reliability requirement as stringent as for automotive application. However, to improve mass production friendliness, careful characterization and process optimization need to be done on several areas, namely bonding surface condition, wire bonding process, as well as wire manufacturing process.
用于超细尺寸BGA的2N金线键合
在本研究中,采用Al键合垫在BGA器件上进行了超细间距线键合,比较了2N线与传统3N线和4N线在热老化后的可靠性性能。在175℃下进行带材级热时效。在100hrs、250hrs、500hrs、750hrs、1000hrs、1250hrs、1500hrs、1750hrs、2000hrs的不同热老化读点后进行拉丝试验,检查拉丝强度和升球失效模式。结果表明,与3N和4N线相比,2N线具有更优越的热老化可靠性性能。在本研究的第二部分,2N线成功量产。然而,由于2N线比传统的3N和4N线硬得多,导致更窄的工艺窗口和更差的可制造性,因此遇到了一些挑战。本研究还旨在分享在大批量生产过程中遇到的主要问题和克服这些挑战的方法。第一个主要挑战是由于对二键表面状况的敏感性较高,导致二键剥离强度较低。研究发现,衬底键合指表面粗糙度的变化是影响2N丝键合过程的关键因素。这可以通过衬底制造工艺优化来改善,以降低键指表面粗糙度。同时发现,优化后的键合输入参数过少会导致线材剥离强度偏低,而某些键合输入参数过高会导致缺球和短尾问题。因此,必须通过彻底的DOE和RSM研究仔细地进行键合参数优化,以获得更高的剥离强度,并提高对第二次键合表面变化的工艺稳稳性。第二个主要挑战是粘接垫,因为在铝粘接垫上粘接时,金属丝更硬,导致铝挤压率更高。研究发现,通过适当的工艺表征来确定器件在加热块上扩展所需的最佳时间长度,再加上进一步改进焊丝机和焊接参数,可以帮助解决这一问题。第三个问题是由于对环境湿度的敏感性较高,电线的粘性较高。钢丝粘连问题的主要影响是由于机尾不一致导致机器停机率升高,从而导致偏心球缺陷。第二个影响是毛细血管堵塞加剧,导致钢丝下垂和钢丝环塌陷。采用不同的钢丝淬火溶液可以克服这种钢丝粘连问题。综上所述,2N线材能够提高超细间距线材粘接的热老化性能,满足与汽车应用一样严格的可靠性要求。然而,为了提高大规模生产的友好性,需要在几个方面进行仔细的表征和工艺优化,即粘接表面条件,线材粘接工艺以及线材制造工艺。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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