H. Hahn, B. Reuters, S. Kotzea, G. Lukens, S. Geipel, H. Kalisch, A. Vescan
{"title":"First monolithic integration of GaN-based enhancement mode n-channel and p-channel heterostructure field effect transistors","authors":"H. Hahn, B. Reuters, S. Kotzea, G. Lukens, S. Geipel, H. Kalisch, A. Vescan","doi":"10.1109/DRC.2014.6872396","DOIUrl":null,"url":null,"abstract":"GaN-based devices have shown to be promising alternatives to Si-based devices in a wide range of applications. After covering several frequency bands in RF power amplification, GaN-based devices also penetrate into the power-switching market. Owing to the high carrier density and the high mobility in a 2-D electron gas (2DEG) and a large bandgap, GaN-based devices have shown great performance. These properties may also be exploited in digital logic applications, for which complementary logic offers the lowest power consumption. Hence, p-channel devices which employ a 2-D hole gas (2DHG) have attracted increasing research interest lately [1,2]. The recent progress of p-channel device characteristics [1] finally enables the monolithic integration of p- and n-channel transistors. Hence, complementary logic on basis of GaN (C-GaN) is within reach. As a first step towards C-GaN, the first report on the integration of enhancement mode (e-mode) n- and p-channel devices on a single wafer is presented. Challenges encountered are discussed and a first voltage transfer characteristic of an inverter structure is shown.","PeriodicalId":293780,"journal":{"name":"72nd Device Research Conference","volume":"49 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-06-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"33","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"72nd Device Research Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DRC.2014.6872396","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 33
Abstract
GaN-based devices have shown to be promising alternatives to Si-based devices in a wide range of applications. After covering several frequency bands in RF power amplification, GaN-based devices also penetrate into the power-switching market. Owing to the high carrier density and the high mobility in a 2-D electron gas (2DEG) and a large bandgap, GaN-based devices have shown great performance. These properties may also be exploited in digital logic applications, for which complementary logic offers the lowest power consumption. Hence, p-channel devices which employ a 2-D hole gas (2DHG) have attracted increasing research interest lately [1,2]. The recent progress of p-channel device characteristics [1] finally enables the monolithic integration of p- and n-channel transistors. Hence, complementary logic on basis of GaN (C-GaN) is within reach. As a first step towards C-GaN, the first report on the integration of enhancement mode (e-mode) n- and p-channel devices on a single wafer is presented. Challenges encountered are discussed and a first voltage transfer characteristic of an inverter structure is shown.