Extending characterization applications of electron channeling contrast imaging

Abstract

The scanning electron microscope based technique, electron channeling contrast imaging (ECCI), is demonstrated for two new applications relevant to PV research: phase separation detection in InxGa1-xP and subsurface InAs/GaAs quantum dot visualization. For both applications, diffraction-based ECC imaging enables the observation of microstructural detail within the material of interest, beneath the sample surface, akin to what it typically acquired via transmission electron microscopy. Verification was performed through application of standard diffraction-based imaging contrast criteria. The ability to characterize phase separation and quantum dots further demonstrates ECCI's usefulness for a wide range of materials, especially in the PV community.