Yanfen Xiao, M. Hofmann, S. Sherman, Yixiao Wang, H. Zappe
{"title":"Technology for polymer-based integrated optical interferometric sensors fabricated by hot-embossing and printing","authors":"Yanfen Xiao, M. Hofmann, S. Sherman, Yixiao Wang, H. Zappe","doi":"10.1109/CSTIC.2015.7153476","DOIUrl":null,"url":null,"abstract":"Integrated optical Mach-Zehnder interferometers (MZI) may be used as high-sensitivity sensors by taking advantage of the interaction of the waveguide evanescent field with liquids or gases surrounding the sensor. We present here the design and simulation of polymer-based MZIs fabricated using printing technologies. Based on simulations of an integrated MZI system with regard to variations of waveguide cross-section and refractive indices of core and cladding to optimize high sensitivity to external refractive index changes of analytes, waveguides with single mode behavior are fabricated by hot-embossing and ink-jet or flexographic printing technologies. Finally, a hybrid combination of a laser diode with the printed MZI will be shown.","PeriodicalId":130108,"journal":{"name":"2015 China Semiconductor Technology International Conference","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 China Semiconductor Technology International Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CSTIC.2015.7153476","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
Integrated optical Mach-Zehnder interferometers (MZI) may be used as high-sensitivity sensors by taking advantage of the interaction of the waveguide evanescent field with liquids or gases surrounding the sensor. We present here the design and simulation of polymer-based MZIs fabricated using printing technologies. Based on simulations of an integrated MZI system with regard to variations of waveguide cross-section and refractive indices of core and cladding to optimize high sensitivity to external refractive index changes of analytes, waveguides with single mode behavior are fabricated by hot-embossing and ink-jet or flexographic printing technologies. Finally, a hybrid combination of a laser diode with the printed MZI will be shown.