Effect of Crystal Orientation on the Surface Texture of Chemically Etched Quartz Plates, the Case of Cuts Close to the AT Cut

Abstract

The changes in profilometry traces depend on the orientation. In particular the size of dissolution figures is very affected by prolonged etching only for some typical orientations (AT-37, AT cut). The decrease in the roughness parameters with the depth of etch may be understood, with respect to the orientation, in terms of stable or continuously moving etch patterns. Surface textures characteristic of the crystal orientation are revealed by the SEM micrographs which agree well with the surface profilometry traces.