Novel temperature/humidity-sensitive multilayer thick-film structures for integrated sensors application

Abstract

Temperature and humidity-sensitive thick-film structures based on spinel semiconducting ceramics different chemical composition (Cu0.1Ni0.1Co1.6Mn1.2O4 and Cu0.1Ni0.8Co0.2Mn1.9O4) and dielectric magnesium aluminate MgAl2O4 ceramics were fabricated and studied. These elements are shown to be successfully applied for integrated temperature/humidity sensors of environmental monitoring and control.