A novel method of WTW for productivity improvement — Stephen Tseng

Abstract

In order to improve tool productivity in semi-conductor manufacturing, we come up with this work reporting a combination of Wait Time Waste (WTW) and Hidden Capacity Diagnostic (HCD) analysis methodology to extract the wafer process information from tool log via SEMI standard and SECS data to do visualization analysis. Thereafter, it is easier to find opportunity to reduce unnecessary process waste time and tool abnormality.