A micro plasma reactor chip: Using interface in micro-/nano-channels towards materials processing

Abstract

A micro plasma reactor chip was fabricated towards materials processing and synthesis. Within the chip, plasma discharge gas and reactive gas were supplied through microchannels. Due to the narrow size of the channel, Reynolds number was calculated to be small. Laminar flows were generated, which resulted in stable interface formation at a flow junction. In the interface area, the excited species in the plasma discharge decomposed the reactive gas molecules in another flow, thereby generating sheet of reactive atomic/molecular species.