{"title":"Safety Measures And Their Cost Reduction Of Semiconductor Equipment","authors":"T. Uchino, H. Shida","doi":"10.1109/ISSM.1994.729436","DOIUrl":null,"url":null,"abstract":"Cost reduction of semiconductor equipment by streamlining safety measures is discussed. Unification of equipment specifications, elimination of over-specification, and maximum use of vendor options are the major guidelines for cost reduction. Consequently the average equipment price has decreased by 20%.","PeriodicalId":114928,"journal":{"name":"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.1994.729436","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Cost reduction of semiconductor equipment by streamlining safety measures is discussed. Unification of equipment specifications, elimination of over-specification, and maximum use of vendor options are the major guidelines for cost reduction. Consequently the average equipment price has decreased by 20%.