AMHS Software Solutions to Increase Manufacturing System Performance

Abstract

In this work, AMHS performance challenges in a ramping 300mm wafer fabrication facilities are identified. Software solutions are described as viable, low cost, minimal fab disruption alternatives to both new and long standing AMHS challenges. Technical design and realized cost, performance, and utilization gains will be shared for various successful software enhancements to the existing fabrication facility's automation software. The conclusion will outline at a high level some future opportunities in this space and challenges for managing these complex software systems