Simulation analysis of 300 mm intrabay automation vehicle capacity alternatives

Abstract

The next generation of semiconductor manufacturing (300 mm) will need to rely on automated material handling equipment for production lot delivery within as well as between bays. This reliance is required for reliability, cleanliness, performance, cost, and ergonomic considerations. Traditional interbay movement systems have achieved exceptional performance by carrying primarily single product lots. Multi-capacity vehicles offer production facilities more advanced capabilities. They have the ability to mix lots during delivery or pick-up, operating much the same as a postman. This paper investigates the relationship between vehicle carrying capacity and process tool batch size by experimenting with a simulation model of the diffusion process. Results indicate that vehicle capacity is the most significant factor affecting average delivery time.