Monolithically integrated InP-based 1.55 /spl mu/m photoreceivers using V-grooved RFPD/HBT integration technology

Abstract

InP-based photoreceivers were successfully integrated with the InP V-groove and the refracting facet photodiode (RFPD), for the first time, based on the shared layer integration technology. The InP-V groove optical bench and the RFPD were simultaneously fabricated using the base-collector layers of the InP/InGaAs HBT. The alignment process of the optical fibre was greatly simplified using the fabricated InP V-grooves. The developed integration technology allowing simple and efficient optical coupling using the on-chip InP V-groove was high speed photoreceivers arrays for dense WDM application.