Characterization of materials for the design of wireless SAW sensors in a high temperature environment

Abstract

In this work, we describe an experiment performed to analyze the behavior of materials deposited on an oxidized silicon substrate submitted to high temperature conditions (650°C to 1000°C). This process developed in FEMTO-ST institute aims to characterize materials of potential interest for wireless SAW (Surface Acoustic Wave) sensors in a “high temperature” environment. The analysis indicates that three kinds of sublayer/electrode pairs (W/Mo, Ta/W and Ta/Mo) are good candidates for further developments in actual sensing devices.