D. Kray, M. Aleman, A. Fell, S. Hopman, K. Mayer, M. Mesec, R. Muller, G. Willeke, S. Glunz, B. Bitnar, D. Neuhaus, R. Ludemann, T. Schlenker, D. Manz, A. Bentzen, E. Sauar, A. Pauchard, B. Richerzhagen
{"title":"Laser-doped silicon solar cells by Laser Chemical Processing (LCP) exceeding 20% efficiency","authors":"D. Kray, M. Aleman, A. Fell, S. Hopman, K. Mayer, M. Mesec, R. Muller, G. Willeke, S. Glunz, B. Bitnar, D. Neuhaus, R. Ludemann, T. Schlenker, D. Manz, A. Bentzen, E. Sauar, A. Pauchard, B. Richerzhagen","doi":"10.1109/PVSC.2008.4922848","DOIUrl":null,"url":null,"abstract":"The introduction of selective emitters underneath the front contacts of solar cells can considerably increase the cell efficiency. Thus, cost-effective fabrication methods for this process step would help to reduce the cost per Wp of silicon solar cells. Laser Chemical Processing (LCP) is based on the waterjet-guided laser (LaserMicroJet®) developed and commercialized by Synova S.A., but uses a chemical jet. This technology is able to perform local diffusions at high speed and accuracy without the need of masking or any high-temperature step of the entire wafer. We present experimental investigations on simple device structures to choose optimal laser parameters for selective emitter formation. These parameters are used to fabricate high-efficiency oxide-passivated LFC solar cells that exceed 20% efficiency.","PeriodicalId":330521,"journal":{"name":"2008 33rd IEEE Photovoltaic Specialists Conference","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-05-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"58","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 33rd IEEE Photovoltaic Specialists Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PVSC.2008.4922848","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 58
Abstract
The introduction of selective emitters underneath the front contacts of solar cells can considerably increase the cell efficiency. Thus, cost-effective fabrication methods for this process step would help to reduce the cost per Wp of silicon solar cells. Laser Chemical Processing (LCP) is based on the waterjet-guided laser (LaserMicroJet®) developed and commercialized by Synova S.A., but uses a chemical jet. This technology is able to perform local diffusions at high speed and accuracy without the need of masking or any high-temperature step of the entire wafer. We present experimental investigations on simple device structures to choose optimal laser parameters for selective emitter formation. These parameters are used to fabricate high-efficiency oxide-passivated LFC solar cells that exceed 20% efficiency.
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