Electromechanically actuated evanescent optical switch and polarization independent attenuator

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI:10.1109/MEMSYS.1998.659804

F. Chollet, M. de Labachelerie, H. Fujital

{"title":"Electromechanically actuated evanescent optical switch and polarization independent attenuator","authors":"F. Chollet, M. de Labachelerie, H. Fujital","doi":"10.1109/MEMSYS.1998.659804","DOIUrl":null,"url":null,"abstract":"Microelectromechanical systems (MEMS) seem able to yield low-cost solution for the telecommunications. An exciting application concerns the study of a commutation matrix which needs a large number of 2/spl times/2 coupler and presumably attenuators to decrease the cross-talk. This paper reports the design and the realization of a bending waveguide used as an optical attenuator and an optical switch. Both devices are based on spatially induced evanescent field interaction, either between two waveguides or between one waveguide and a lossy medium. First, we present the simulations used for the design with expected performances. Then we report the main points of the technological process based on silicon micromachining. Eventually, optical results are presented with the operation of the device as a polarization insensitive attenuator. This later results definitely establishes the feasibility of an optical coupler actuated mechanically.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1998.659804","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 5

Abstract

Microelectromechanical systems (MEMS) seem able to yield low-cost solution for the telecommunications. An exciting application concerns the study of a commutation matrix which needs a large number of 2/spl times/2 coupler and presumably attenuators to decrease the cross-talk. This paper reports the design and the realization of a bending waveguide used as an optical attenuator and an optical switch. Both devices are based on spatially induced evanescent field interaction, either between two waveguides or between one waveguide and a lossy medium. First, we present the simulations used for the design with expected performances. Then we report the main points of the technological process based on silicon micromachining. Eventually, optical results are presented with the operation of the device as a polarization insensitive attenuator. This later results definitely establishes the feasibility of an optical coupler actuated mechanically.

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机电驱动的倏逝光开关和偏振无关衰减器

微机电系统(MEMS)似乎能够为电信提供低成本的解决方案。一个令人兴奋的应用涉及对换相矩阵的研究，该换相矩阵需要大量的2/ 1倍/2耦合器和可能的衰减器来减少串扰。本文报道了一种用于光衰减器和光开关的弯曲波导的设计与实现。这两种器件都是基于空间诱导的倏逝场相互作用，要么在两个波导之间，要么在一个波导和有耗介质之间。首先，我们给出了具有预期性能的设计的仿真。然后报告了基于硅微加工的工艺流程要点。最后，给出了该器件作为偏振不敏感衰减器工作时的光学结果。这一结果明确确立了机械驱动光学耦合器的可行性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176

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